Permeability Enhancement in Porous-Sintered Reaction-Bonded Silicon Nitrides
نویسندگان
چکیده
منابع مشابه
Mechanical properties of sintered meso-porous silicon: a numerical model
: Because of its optical and electrical properties, large surfaces, and compatibility with standard silicon processes, porous silicon is a very interesting material in photovoltaic and microelectromechanical systems technology. In some applications, porous silicon is annealed at high temperature and, consequently, the cylindrical pores that are generated by anodization or stain etching reorgani...
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ژورنال
عنوان ژورنال: International Journal of Applied Ceramic Technology
سال: 2010
ISSN: 1546-542X
DOI: 10.1111/j.1744-7402.2010.02511.x